Waferpedia

Comparison ledger

0035235-003 MMD Headversusscope2

KLA 0035235-003 MMD Head, Olympus scope2, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
scope2Olympus
OEMKLAOlympus
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 0035235-003 MMD HeadOlympus scope2
Specifications
ConfigurationTSTD PCB ASSY, MMD MEAS HEAD[1]—
Model0035235-003[1]MX-61[2]
MakeKLA[1]—
Part DescriptionTSTD PCB ASSY, MMD MEAS HEAD[1]—
Compatible SystemKLA AIT-XP[1]—
Vendor—Olympus[2]
Purpose—Semiconductor microscope for sample inspection and documentation[2]
Observation methods—Brightfield and darkfield[2]
Objectives—5x, 10x, 20x, 50x, and 100x objectives on motorized turret[2]
Stage focus—Manual stage focus[2]
Digital imaging software—Steam Motion software for calibrated measurements[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]uwaterloo.cauwaterloo.ca