Waferpedia

Comparison ledger

VHX-7000versus.204 PSL Wafer

Keyence VHX-7000, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
VHX-7000Keyence
OEMKeyenceKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size8-inch wafers—
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKeyence VHX-7000KLA .204 PSL Wafer
Specifications
Product typeDigital microscope[1]—
Magnification20× to 2500×[1]—
Illumination modesBrightfield and darkfield[1]—
Stage typeFully motorised 300 mm XY stage[1]—
FocusingAutomatic[1]—
Image acquisitionHigh-resolution[1]—
Configuration—NIST Traceable[2]
Wafer Size—8 inch[2]
Traceability—NIST[3]
Compatible Tools—Surfscan 6xy0, Sp1[2]
NIST Traceable—Yes[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]epfl.chepfl.ch
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com