Comparison ledger
Hitachi SU 8030 FEG-SEM, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SU 8030 FEG-SEMHitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | 4" | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi SU | KLA .204 PSL Wafer |
| Specifications | ||
| Configuration | Computer Controlled 5 Axis Motorized Stage (110mm x 110mm)[1] | NIST Traceable[2] |
| Wafer size | 4" Wafer Holder for SU8030/SU8040[1] | — |
| Stage | Computer Controlled 5 Axis Motorized Stage (110mm x 110mm)[1] | — |
| Detector System | Triple Electron Detector System w/ Super ExB[1] | — |
| Specimen Airlock | 6" Specimen Exchange Airlock[1] | — |
| Beam Deceleration | Beam Deceleration System[1] | — |
| Vacuum System | TMP Dry Vacuum System[1] | — |
| EDS Integration | EDS Ready with DBC (P/N536-9805) and RS-232 Interface (P/N536-9807)[1] | — |
| Operating System | Windows XP[1] | — |
| Safety Compliance | UL and S2-02 Safety Compliance[1] | — |
| Wafer Size | — | 8 inch[2] |
| Traceability | — | NIST[3] |
| Compatible Tools | — | Surfscan 6xy0, Sp1[2] |
| NIST Traceable | — | Yes[2] |
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