Waferpedia

Comparison ledger

017-0024-01 PrealignerversusTitan

Brooks 017-0024-01 Prealigner, Ultratech Titan, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
TitanUltratech
OEMBrooksUltratech
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0024-01 PrealignerUltratech Titan
Specifications
OEM—Ultratech[1]
Model—Titan[1]
Equipment type—Stepper[1]
Vintage—1999 vintage[1]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing