Comparison ledger
Brooks 017-0024-01 Prealigner, SUSS MicroTec MJB 3 Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0024-01 PrealignerBrooks | MJB 3 MaskSUSS MicroTec |
|---|---|---|
| OEM | Brooks | SUSS MicroTec |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0024-01 Prealigner | SUSS MicroTec MJB |
| Specifications | ||
| Configuration | — | Refurbished[1] |
| Power | — | 350W lamphouse with Ushio USH-350DS Hg lamp[2] |
| Wafer size | — | 3 inch[2] |
| Lamp | — | 350W lamphouse with Ushio USH-350DS Hg lamp[2] |
| Optics type | — | UV400 near UV optics, 350-450 nm[2] |
| Resolution | — | 0.6 µm[2] |
| Microscope | — | Splitfield microscope with Leica objectives 3.5x/10x/20x[2] |
| Vacuum chuck size | — | 3 inch[2] |
| Mask holder size | — | 3x3 inch[2] |
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