Comparison ledger
Brooks 017-0024-01 Prealigner, Nikon NSR 2205 i 14 E 2 i-Line, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0024-01 PrealignerBrooks | |
|---|---|---|
| OEM | Brooks | Nikon |
| Category | Lithography | Lithography |
| Wafer size | — | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0024-01 Prealigner | Nikon NSR 2205 |
| Cited variants | — |
|
| Specifications | ||
| Configuration | — | Asahi N 4 A-C Chamber:[2] |
| Chamber | — | 21.1℃[2] |
| LLTC | — | 23℃[2] |
| MCSV Version | — | 3.46 C[2] |
| Resolution | — | 0.35μm or better[6] |
| N.A. | — | 0.63 Exposure light source: i line[6] |
| Reduction ratio | — | 1:5[6] |
| Exposure field size | — | 22mm square to 17.9 (H) x 25.2 (V)mm[6] |
| Alignment accuracy (EGA, |x|+3σ) | — | 40nm or better[6] |
| Alignment system | — | LSA(standard), FIA(standard), LIA(optional)[6] |
| Wafer size | — | Throughput ≧ 103 wafers/hour (200 mm wafer)[6] |
| Magnification | — | 1/5 Reduction[6] |
| Light-Source | — | i-Line(365nm)[7] |
| Make | — | Nikon[2] |
| Model | — | NSR 2205 i 14 E 2[2] |
| Set Temperature | — | -[2] |
| Chamber Temperature | — | 21.1°C[2] |
| Computer Type | — | Alpha Station, HP Alpha Server DS 15 A, Smart Modular Technology ETM 25 SA, Nikon Nest[2] |
| Vintage | — | 2006 (unit 137809), 2001 (unit 137808), 2008 (unit 137807), 2001 (unit 137806), 2001 (unit 137805)[2] |
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