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017-0024-01 PrealignerversusNSR 204 B

Brooks 017-0024-01 Prealigner, Nikon NSR 204 B, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
017-0024-01 PrealignerBrooks
NSR 204 BNikon
OEMBrooksNikon
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0024-01 PrealignerNikon NSR 204 B
Specifications
Wafer size—8 inch[1]
Exposure source—DUV (KrF laser, GIGAPHOTON G20K2)[2]
Year of manufacture—2000[1]
017-0024-01 Prealigner entryNSR 204 B entryAsk about these tools →Share experience with this comparison →

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Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]semi-sps.comsemi-sps.com