Waferpedia

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017-0024-01 PrealignerversusFPA 5510 iZ i-Line

Brooks 017-0024-01 Prealigner, Canon FPA 5510 iZ i-Line, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
017-0024-01 PrealignerBrooks
FPA 5510 iZ i-LineCanon
OEMBrooksCanon
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0024-01 PrealignerCanon FPA 5510
Specifications
Configuration—Wide-Field[1]
Wafer Size—12 inch (300 mm)[1]
Type—i-Line Stepper[1]
Field—Wide-Field[1]
Wafer size—12 inch[2]
017-0024-01 Prealigner entryFPA 5510 iZ i-Line entryAsk about these tools →Share experience with this comparison →

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing