Comparison ledger
Axcelis 200 ACU, Plasma-Therm Versaline LACVD, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 ACUAxcelis | Versaline LACVDPlasma-Therm |
|---|---|---|
| OEM | Axcelis | Plasma-Therm |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Plasma-Therm Versaline |
| Specifications | ||
| Configuration | Parts Machine[1] | 2x loadlock Ports[5] |
| Manufacturer | Axcelis[1] | — |
| Model | 200 ACU[1] | — |
| Tool type | Asher[1] | — |
| Wafer size | 200mm[3] | — |
| Serial number | AU6A356AH[3] | — |
| Computer system | M 200 PC, M 200[4] | — |
| Part number | SC 4572 A[4] | — |
| Volts | 208[4] | — |
| Amps | 30[4] | — |
| Equipment type | Asher[1] | — |
| Wafer configuration | 8 inch[2] | — |
| Operating system | — | Windows 7 Professional SP1 OS[5] |
| Tool software | — | Plasma-Therm Cortex[5] |
| OES Software | — | Plasma-Therm EndpointWorks[5] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →