Waferpedia

Comparison ledger

Twinscan 1200 Bversus017-0024-01 Prealigner

ASML Twinscan 1200 B, Brooks 017-0024-01 Prealigner, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMASMLBrooks
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyASML TwinscanBrooks 017-0024-01 Prealigner
Specifications
Configurationwith Cymer XLA 160 laser[1]—
LaserCymer XLA 160[2]—

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com