Waferpedia

Comparison ledger

VIISta HE XPversus160 XP

Applied Materials VIISta HE XP, Varian 160 XP, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
VIISta HE XPApplied Materials
160 XPVarian
OEMApplied MaterialsVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials VIISTAVarian 160 XP
Cited variants—
Specifications
ConfigurationHigh Current[2]—
ManufacturerApplied Materials / Varian[2]—
ModelVIISta HE XP[2]—
TypeImplanter[2]—
CurrentHigh Current[2]—
Wafer Size8 inch[2]—
Configuration (160 XP Ion variant)—150mm High Current IMP[1]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]inventory listing
  3. [3]fabsurplus.comfabsurplus.com