Comparison ledger
Applied Materials Centura I DPS Poly, Axcelis 200 ACU, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Centura I DPS PolyApplied Materials | 200 ACUAxcelis |
|---|---|---|
| OEM | Applied Materials | Axcelis |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials Centura | Axcelis NV GSD 200 |
| Specifications | ||
| Configuration | 2x DPS Poly Chambers[1] | Parts Machine[2] |
| Phase | 3 Phase[1] | — |
| Voltage | 208 Vac[1] | — |
| Wafer Size | 8 inch[1] | — |
| Chambers | 2x DPS Poly Chambers[1] | — |
| RF Generators | Advanced Energy RF 5S and RF 20 RWC 2000[1] | — |
| Power | 3 Phase, 4 Wire, 208 Vac, 50/60 Hz[1] | — |
| Manufacturer | — | Axcelis[2] |
| Model | — | 200 ACU[2] |
| Tool type | — | Asher[2] |
| Wafer size | — | 200mm[4] |
| Serial number | — | AU6A356AH[4] |
| Computer system | — | M 200 PC, M 200[5] |
| Part number | — | SC 4572 A[5] |
| Volts | — | 208[5] |
| Amps | — | 30[5] |
| Equipment type | — | Asher[2] |
| Wafer configuration | — | 8 inch[3] |
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