Comparison ledger
Applied Materials 0020 18455 Part, CHA Mark 50 E-Beam, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0020 18455 PartApplied Materials | |
|---|---|---|
| OEM | Applied Materials | CHA |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0020 18455 Part | CHA Mark 50 |
| Specifications | ||
| Configuration | Shaft,Rf In Local Match, Hdpcvd,Rev3[1] | 110 / 220 Vac[2] |
| Phase | — | 3 Phase[2] |
| Frequency | — | 50 Hz[2] |
| Power Supply | — | 3 Phase, 110/220 Vac, 50 Hz[2] |
| Wires | — | 5[2] |
| Compressor | — | CTI 9700 A[2] |
| E-Beam Power Supply | — | Ulvac HPS 1000 F[2] |
| Transformer | — | IMAI NT 3 X[3] |
| CHA SR 10 | — | Included[3] |
| Vintage | — | 2016[2] |
| Compatibility | — | Class A and B Metals and Compounds[4] |
| Restrictions | — | No high vapor pressure materials; no oxide evaporation[4] |
| Voltage | — | 110/220 Vac[2] |
| Vintage Year | — | 2016[2] |
| Location (CNF) | — | Room 110[4] |
| Category | — | E-Beam Evaporator[5] |
| Electrical Specifications | — | 3 Phase - 110 / 220 Vac - 50 Hz - 5 Wires[2] |
| Additional Components | — | CHA SR 10 - IMAI NT 3 X Transformer[3] |
| Class Compatibility | — | 5 - Class A and B Metals and Compounds[4] |
Plan your fab
Building a Deposition process? Get a complete equipment list.
Open the fab equipment planner →