Waferpedia

Comparison ledger

0020 12458 PartversusConcept Three Speed

Applied Materials 0020 12458 Part, Lam Research Concept Three Speed, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 12458 PartApplied Materials
OEMApplied MaterialsLam Research
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 12458 PartLam Research Concept Three
Cited variants—
  • Triple Speed NF[1]
Specifications
ConfigurationInsulator,Side Match,Hdp-Cvd Ultima Plus[2]Triple Speed NF[1]
Asset number146526[2]—
MakeApplied Materials[2]Lam / Novellus[3]
Model0020 12458[2]Concept Three Speed[3]
Speed Handler Type—WTS IMM[1]
Primary User Interface—Flat Panel Right[1]
WTS Vacuum PEC Location—Port 5[1]
Module A Location—Port 2[1]
Module B Location—Port 3[1]
Module C Location—Port 4[1]
Handler Facilities—Bottom[1]
Interconnect Cable—Length 75 Feet[1]
Software Version—5.73[1]
Software Build—78[1]
Operating System—Windows XP/2000[1]
User Interface Type—Ballroom[1]
Signal Tower Operation—3 Color Light Tower(RYG)[1]
FOUP ID Reader Type—OMRON[1]
ATM Robot End Effector—Vacuum[1]
OEM—Lam / Novellus[3]
Process—CVD (Chemical Vapor Deposition)[3]
Wafer Size—12 inch[3]
Vintage—2005[3]
Interconnect Cable Length—75 Feet[1]
Front End Robot Type—Brooks ATR 8[1]
TM Robot Type—Brooks Mag 7[1]
IMM Readiness Option—No[1]
FA Communication Interface—No[1]
Handler Leak Check Shut Off Valve—No[1]
Equipment type—CVD (Chemical Vapor Deposition)[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing
  3. [3]Equipment inventory listing