Comparison ledger
Zeiss Sigma 300 VP FE-SEM, Zeiss Sigma HDVP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Sigma 300 VP FE-SEMZeiss | Sigma HDVPZeiss |
|---|---|---|
| OEM | Zeiss | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Zeiss Sigma | Zeiss Sigma |
| Specifications | ||
| Configuration | 50/60 Hz[1] | Electron source[2] |
| 1/N/PE | 230 Vac[1] | — |
| 2/PE | 208 Vac[1] | — |
| Power Frequency | 50/60 Hz[1] | — |
| Voltage (1/N/PE) | 230 Vac[1] | — |
| Voltage (2/PE) | 208 Vac[1] | — |
| Current | 16 A[1] | — |
| Short-Circuit Current Rating (SCCR) | 3.5 kA[1] | — |
| Included Detector | Bruker XFlash 6 I 30 Detector[1] | — |
| Vintage | 2022[1] | — |
| Acceleration voltage | — | 0.02 kV - 30 kV[2] |
| Magnification range | — | 10-1.000.000x[2] |
| Specimen chamber | — | 358 mm[2] |
| Stage axes | — | 5 axes (X:30 mm, Y:130 mm, Z:50 mm, T:-3°-70°, R:360°)[2] |
| Detectors | — | HD AsB, CL, STEM, SCD[2] |
| Pumps | — | Turbomolecular pump, Ion getter pump, Ultimate high vacuum pump[2] |
| Control PC | — | TFT Monitor 19", Windows 7, 4 GB RAM, HDD[2] |
| Display | — | TFT Monitor, 19“[2] |
| Operating system | — | Windows 7[2] |
| RAM | — | 4 GB[2] |
| User interface | — | Keyboard, Mouse[2] |
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