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TurboDisc K 465 GaN MOCVDversusTurboDisc K 465 MOCVD

Veeco TurboDisc K 465 GaN MOCVD, Veeco TurboDisc K 465 MOCVD, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMVeecoVeeco
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyVeeco TurboDisc K 465Veeco TurboDisc K 465
Specifications
ConfigurationK465 GaN Turbo disk[1]K465 GaN Turbo disk[2]
Phase3 Phase[1]3 Phase, - 5 Wire[2]
Voltage400 Vac, 280 A, 50/60 Hz[1]400 Vac, 280 A, 50/60 Hz[2]
MakeVeeco[1]—
ModelTurboDisc K 465[1]—
Equipment typeGaN MOCVD (Metal Organic Chemical Vapor Deposition)[1]—
Alternative designationTurboDisc K465 GaN Turbo disk[1]—
Electrical requirements3 Phase, 5 Wire, 400 Vac, 280 A, 50/60 Hz[1]—
Vintage2009[1]—

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing