Comparison ledger
Varian 160 XP, Varian E 500 EHPI Ion Implant, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 160 XPVarian | E 500 EHPI Ion ImplantVarian |
|---|---|---|
| OEM | Varian | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | 2000– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Varian 160 XP | Varian E 500 EHPI Ion Implant |
| Cited variants |
| — |
| Specifications | ||
| Configuration (160 XP Ion variant) | 150mm High Current IMP[1] | — |
| Power | — | 208 V,50/60 Hz, 3 Phase[2] |
| Configuration | — | CE Mark[2] |
| Connection | — | Top[2] |
| Source 1 | — | IHC[2] |
| Extraction Electrode | — | EHP[2] |
| Bushing | — | EHP[2] |
| Wafer Size | — | 6 inch[2] |
| CE Mark | — | Yes[2] |
| Vintage | — | 2000[2] |
| Control Computer | — | Windows 7[2] |
| Software Version | — | V15.10.12[2] |
| Chuck system | — | ESC[2] |
| Computer | — | Win7[2] |
| Software | — | V15.10.12[2] |
| Source Turbo | — | Pfeiffer[2] |
| Analyzer Turbo | — | Pfeiffer[2] |
| Scanner Turbo | — | Pfeiffer[2] |
| LoadLock right | — | Cryo[2] |
| LoadLock left | — | Cryo[2] |
| Source/Terminal | — | Edwards Setup[2] |
| Differential Seal | — | Busch Scroll Fossa 15[2] |
| End station / Load Lock | — | Edwards Setup[2] |
| Cryo Comp | — | 9700A[2] |
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