Comparison ledger
SUSS MicroTec MJB 3 Mask, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MJB 3 MaskSUSS MicroTec | 1000 FamilyUltratech |
|---|---|---|
| OEM | SUSS MicroTec | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | SUSS MicroTec MJB | Ultratech 1000 Family |
| Specifications | ||
| Configuration | Refurbished[1] | — |
| Power | 350W lamphouse with Ushio USH-350DS Hg lamp[2] | — |
| Wafer size | 3 inch[2] | — |
| Lamp | 350W lamphouse with Ushio USH-350DS Hg lamp[2] | — |
| Optics type | UV400 near UV optics, 350-450 nm[2] | — |
| Resolution | 0.6 µm[2] | — |
| Microscope | Splitfield microscope with Leica objectives 3.5x/10x/20x[2] | — |
| Vacuum chuck size | 3 inch[2] | — |
| Mask holder size | 3x3 inch[2] | — |
| Tool type | — | Photolithography step-and-repeat 1X stepper[3] |
| Optical design | — | Wynne Dyson[3] |
| Magnification | — | 1X[3] |
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