Waferpedia

Comparison ledger

M1versusDSS 200

MRSI M1, Ontrak DSS 200, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
M1MRSI
DSS 200Ontrak
OEMMRSIOntrak
Category——
Wafer size8"8"
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyMRSI M1Ontrak DSS 200
Specifications
Wafer handlingup to 8 inch[1]—
Control platformGraphical Windows™ interface[1]—
Configuration—Series I[2]
Phase—Wafer Spin Washer/Dryer - 120 VAC - Single Phase - 60 Hz - 15 A[3]
Wafer size—8" Silicon Wafer Processing[3]
Frequency—60 Hz[2]
Voltage—120 Vac[2]
Vintage—1996[2]
Make—Ontrak[2]
Model—DSS 200[2]
Power Phase—1 Phase[2]
AC Voltage—120 Vac[2]
Sources (4)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]Equipment inventory listing