Waferpedia

Comparison ledger

1 DP 41versusPM5

Logitech 1 DP 41, Logitech PM5, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1 DP 41Logitech
PM5Logitech
OEMLogitechLogitech
CategoryCMPCMP
Wafer size—100mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLogitech 1 DP 41Logitech PM5
Specifications
Phase3 Phase[1]—
Configuration50/60 Hz[1]—
Voltage480 V[1]—
MakeLogitech[1]—
Model1 DP 41[1]PM5[2]
Frequency50/60 Hz[1]—
Current12 amps[1]—
Manufacturer—Logitech[2]
Application—Polishing and lapping[2]
Abrasive autofeed cylinder compatibility—Abrasive autofeed cylinder for use with a Logitech PM5 or LP50 system[3]
Sample wafer size—4 inch (100mm) or smaller[4]
Power supply voltage—Single phase AC100V[4]
Machine type—Lapping and polishing system[4]
Number of workstations—Single[5]
Wafer size—100 mm (4 inches) or smaller[4]
Polishing plate material—Stainless steel[4]
Lapping plate material—Cast iron[4]
Sample holding method—Vacuum[4]
Variable plate speed—Yes[4]
Slurry delivery method—Peristaltic pump[4]
Roller arm assembly—Yes[4]
Emergency stop—Yes[4]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]smif.pratt.duke.edusmif.pratt.duke.edu
  3. [3]web.archive.orgweb.archive.org
  4. [4]manualslib.commanualslib.com
  5. [5]waferpedia.comwaferpedia.com