Waferpedia

Comparison ledger

15 Lapperversus36

Lapmaster 15 Lapper, Lapmaster 36, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
15 LapperLapmaster
36Lapmaster
OEMLapmasterLapmaster
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLapmaster 15Lapmaster 36
Cited variants—
  • Pneumatic Lift Version[1]
  • Open Face Version[1]
Specifications
Number Of Conditioning RingsUp to 3[2]—
Ring IDUp to 5.5″[2]—
Plate Diameter – Outside15″[2]—
Plate Diameter – Inside3 1/2″[2]—
Standard RPM60[2]—
Drive Motor1/2 HP[2]4 kW (5 HP)[1]
Electrics110V / 1Ph / 60Hz[2]—
Dimensions – Approximate26″(L-R) x 21″(F-B) x 22″(H)[2]—
ConfigurationEquipped with:[2]Two Rings Pump[4]
Equipped with: 15″ Cast Iron PlateIncluded[2]—
Equipped with: (3) Yoke/Roller Bearing AssembliesIncluded[2]—
Equipped with: (3) Conditioning RingsIncluded[2]—
Equipped with: (3) Hold DownsIncluded[2]—
Equipped with: 30 Minute TimerIncluded[2]—
Phase—3 Phase[3]
Model Type—36[1]
Number of Conditioning Rings—3[1]
Standard Lap Plate Speed—58 rpm[1]
Lapping Plate Outer Diameter—36 inches (914 mm)[1]
Lapping Plate Inner Diameter—6.75 inches (172 mm)[1]
Conditioning Ring Outer Diameter—419 mm (16.5 inches)[1]
Conditioning Ring Inner Diameter—368 mm (14.5 inches)[1]
Wear Life—2.8 inches (70 mm)[1]
Weight—1202 kg (2650 lbs)[1]
Shipping Weight—1383 kg (3050 lbs)[1]
Power Supply—230 V/460 V, 3 phase, 60 Hz[1]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]inventory listing