Waferpedia

Comparison ledger

120 Continuousversus1500 66 T Double Sided Optical

Lapmaster 120 Continuous, PR Hoffman 1500 66 T Double Sided Optical, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMLapmasterPR Hoffman
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLapmaster 120 ContinuousPR Hoffman 1500 66 T Double Sided Optical
Specifications
Configuration—Capacities:[1]
Plate—15"[1]
Carriers—5.3"[1]
Teeth—66[1]
Downward force—15 - 200 Lbs.[1]
Top plate—1 - 135 RPM[1]
Ring gear—1 - 135 RPM[1]
Sun gear—1 - 103 RPM[1]
Type—double sided optical polisher[1]
Top plate speed—1 - 135 RPM[1]
Ring gear speed—1 - 135 RPM[1]
Sun gear speed—1 - 103 RPM[1]
Vintage—2000[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing