Comparison ledger
KLA HRP 340, KLA HRP 340 Surface, KLA HRP 340 Thickness Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | HRP 340KLA | ||
|---|---|---|---|
| OEM | KLA | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | 8" | — |
| Process node | — | — | — |
| Introduced | — | — | — |
| Production run | — | — | — |
| Lifecycle | — | — | — |
| Lifecycle milestones | — | — | — |
| Control system | — | — | — |
| Generation | — | — | — |
| Family | KLA HRP 340 | KLA HRP 340 | KLA HRP 340 |
| Specifications | |||
| Product type | Profilometer[1] | — | — |
| Measured parameter | Wafer thickness[2] | — | — |
| Wafer size | 12 inch[1] | PSL Standard 8 inch Wafer (9400 A Standard)[4] | 12 inch[7] |
| Electrical supply voltage | 230 Volts[2] | — | — |
| Electrical supply frequency | 50/60 Hz[2] | — | — |
| Phase | 1 Phase / 3 Wires[2] | — | 1 Phase / 3 Wires[7] |
| Configuration | — | Bad Load port[3] | 50/60 Hz[7] |
| OS | — | Windows XP[4] | — |
| Vertical Range | — | 0-131 um[4] | — |
| Style Force | — | 0.05-15 mg[4] | — |
| Stylus | — | 2.0 um / 60[4] | — |
| OEM | — | KLA[3] | — |
| Model | — | HRP 340 Surface[3] | — |
| Category | — | Metrology & Inspection[5] | — |
| Model designation | — | HRP340[6] | — |
| Description | — | Surface profilometer[3] | — |
| Status | — | Sold[6] | — |
| Vintage | — | 2007[6] | — |
| Condition | — | Excellent[6] | — |
| Power frequency | — | — | 50/60 Hz[7] |
| Voltage | — | — | 230 Volts[7] |
| Phase / wiring | — | — | 1 Phase / 3 Wires[7] |
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