Comparison ledger
KLA .498 PSL Wafer, Thermo Fisher Scientific FEI Titan 80 300 TEM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Scientific FEI Titan 80 300 TEMThermo Fisher | |
|---|---|---|
| OEM | KLA | Thermo Fisher |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .498 PSL Wafer | Thermo Fisher Scientific FEI Titan 80 300 TEM |
| Specifications | ||
| Configuration | NIST Traceable[1] | Schottky FEG[2] |
| NIST traceability | Yes[1] | — |
| Electron source | — | Schottky FEG[2] |
| Condenser lens system | — | 3-Condenser Lens System[2] |
| Image corrector | — | Cs image corrector with image corrector PC and power supply unit[2] |
| Imaging software | — | TrueImage software[2] |
| EDX detector | — | Bruker XFlash EDX Detector 6T – 100RT with a standalone workstation[2] |
| Energy filter / EELS | — | Gatan Tridiem GIF capable of EELS and EFTEM[2] |
| STEM scanning | — | Gatan DigiScan[2] |
| STEM detector (bright field / dark field) | — | Gatan ADF/BF STEM detector[2] |
| STEM software | — | Gatan DigitalMicrograph software[2] |
| TEM imaging software | — | FEI TIA software[2] |
| HAADF detector | — | Fischione HAADF detector[2] |
| CCD camera | — | US1000 Bottom mount CCD camera[2] |
| Lorentz lens | — | Lorentz Lens for Lorentz TEM imaging[2] |
| Aperture alignment system | — | AAS at the C2 and objective aperture positions[2] |
| Manual apertures | — | Manual apertures at SA, C3, and C1 aperture positions[2] |
| Lens control software | — | Free lens control software[2] |
| Tomography software | — | Tomography software[2] |
| Alignment voltages | — | Alignments at 80kV and 300kV[2] |
| Chiller | — | Haskris Chiller Model R175EW[2] |
| UPS | — | Toshiba UPS 4200FA with a Power Battery Company UPS battery supply[2] |
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