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.498 PSL WaferversusOP 1600 Film Thickness Measurement

KLA .498 PSL Wafer, KLA OP 1600 Film Thickness Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Attribute
.498 PSL WaferKLA
OP 1600 Film Thickness MeasurementKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .498 PSL WaferKLA OP
Specifications
ConfigurationNIST Traceable[1]Equipe ATM[3]
NIST traceabilityYes[1]—
Software—3.0 K 14[2]
Equipment type—Film Thickness Measurement System[2]
Manufacturer—KLA / Therma-wave[2]
Model—OP 1600[2]
Wafer size support—12 inch[2]
Software version—3.0 K 14 (3.0K14)[2]
Unit equipment configuration—Equipe ATM (on some units)[3]
Unit vintage—1995[2]
.498 PSL Wafer entryOP 1600 Film Thickness Measurement entryAsk about these tools →Share experience with this comparison →

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]Equipment inventory listing