Comparison ledger
KLA 1007, Tokyo Electron Precio XL, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1007KLA | Precio XLTokyo Electron |
|---|---|---|
| OEM | KLA | Tokyo Electron |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1007 | Tokyo Electron Precio |
| Specifications | ||
| Manufacturer | KLA[1] | Tokyo Electron Limited[4] |
| Model | 1007[1] | Precio XL[4] |
| Description | Wafer Prober[1] | — |
| Wafer size | 150 mm[1] | 200 mm, 300 mm[4] |
| Convertible to 8 inch wafer size | Yes[1] | — |
| Vintage | 01.06.1995[1] | — |
| Make | KLA[2] | — |
| Equipment type | Prober[2] | Production Wafer Prober[6] |
| Configuration | — | Single Open with Open Loader[3] |
| Hot Chuck Function | — | 50~150 deg[3] |
| Type | — | Automatic wafer prober[5] |
| Accuracy | — | 1.8 µm[4] |
| Z accuracy | — | 5 µm[4] |
| Probing force | — | 200 kg, 300 kg[4] |
| Stage type | — | Linear Motor[4] |
| Functions | — | Focus OCR; hot chuck function 50~150 deg; WAPP function; 93K DD interface; flip SACC function; GPIB[3] |
| Category | — | Test & Probe[6] |
| Main features | — | TELPADS-I, Auto Leveling, CoSMOz[5] |
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