Comparison ledger
KLA 1007, Semitool SST C 421 280 Batch Wafer Processing, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1007KLA | |
|---|---|---|
| OEM | KLA | Semitool |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1007 | Semitool SST C 421 280 Batch Wafer Processing |
| Specifications | ||
| Manufacturer | KLA[1] | Semitool[4] |
| Model | 1007[1] | SST C 421 280[4] |
| Description | Wafer Prober[1] | — |
| Wafer size | 150 mm[1] | — |
| Convertible to 8 inch wafer size | Yes[1] | — |
| Vintage | 01.06.1995[1] | 2004[5] |
| Make | KLA[2] | — |
| Equipment type | Prober[2] | — |
| Wafer Size | — | 6 inch[3] |
| Power | — | 208 VAC[5] |
| Full Load Current | — | 30 A[4] |
| Largest Motor or Load | — | 10 A (15 HTR)[4] |
| Short Circuit Interrupt | — | 10,000 A[4] |
| Heat Exchanger | — | Present[5] |
| Vacuum | — | Present[5] |
| CDA | — | 65–70 PSI[5] |
| DI Water | — | 35 PSI Minimum[5] |
| Process Gas | — | N₂ / CO₂[5] |
| Condition Note | — | Visible Corrosion on Modules[5] |
| Missing Components | — | Wafer Handler, Power Supply, AC Distribution Box, External Transformer, UPS, Backing Pump(s), Shipping Brackets[5] |
| Voltage | — | 208 VAC[4] |
| Phase | — | 3 Phase[4] |
| Wafer Sizes | — | 6 inch, 8 inch (200mm)[4] |
| CDA Pressure | — | 65–70 PSI[5] |
| DI Water Pressure (Minimum) | — | 35 PSI[5] |
| Frequency | — | 50/60 Hz[4] |
| DI water pressure | — | 35 PSI minimum[5] |
| Version | — | 200mm[6] |
| Sales condition | — | as is where is[6] |
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