Comparison ledger
Kawasaki 3 NS 411 B F 003 Atmospheric Wafer Robot, Strasbaugh 100R16, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 100R16Strasbaugh | |
|---|---|---|
| OEM | Kawasaki | Strasbaugh |
| Category | CMP | CMP |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Kawasaki 3 NS 411 B F 003 Atmospheric Wafer Robot | Strasbaugh 100R16 |
| Specifications | ||
| Configuration | AMAT 12" CMP[1] | — |
| Equipment Type | Atmospheric Wafer Robot[1] | — |
| Wafer Size | 12 inch[1] | — |
| Category | CMP[2] | — |
| Manufacturer | Kawasaki[1] | — |
| Model | 3 NS 411 B F 003[1] | — |
| type | — | 1 spindle grinder/polisher[3] |
| drive system | — | DC drive system with 2 motors[3] |
| spindle RPM | — | 1-180 RPM[3] |
| eccentric RPM | — | 1-90 RPM[3] |
| controls | — | digital timer; air down switch; spindle and eccentric speed dials; air regulators[3] |
| capacity | — | 16 inches[3] |
| spindle size | — | 1-8 TPI[3] |
| overall dimensions | — | 28 inches x 36 inches x 48 inches[3] |
| weight | — | 500 lbs[3] |
| origin | — | made in the USA[3] |