Comparison ledger
Hitachi 4800, KLA .498 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 4800Hitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 4800 | KLA .498 PSL Wafer |
| Specifications | ||
| Instrument type | Modern high resolution FE SEM[1] | — |
| Detector | In Lens SE[1] | — |
| Objective lens | Magnetic semi immersion[1] | — |
| Source | TFE[1] | — |
| Accelerating voltage | 500 V to 30 kV[2] | — |
| Source type | TFE[1] | — |
| Lens design | Magnetic semi-immersion[1] | — |
| Detectors | In-lens SE, E-T SE[1] | — |
| Configuration | — | NIST Traceable[3] |
| NIST traceability | — | Yes[3] |
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