Comparison ledger
Headway PWM 32 PS CB 15 Spinner, Semitool 003163-000 SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | PWM 32 PS CB 15 SpinnerHeadway | 003163-000 SRDSemitool |
|---|---|---|
| OEM | Headway | Semitool |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Headway PWM 32 PS CB 15 Spinner | Semitool 003163-000 SRD |
| Specifications | ||
| Configuration | Used with organic solvents[1] | — |
| Voltage | 115 Vac[1] | — |
| Model | PWM 32 PS CB 15[1] | 003163-000[3] |
| Model designation | PWM32-PS-CB15 Spinner System[2] | — |
| Bowl | Circular bowl, 15" diameter[2] | — |
| Process use | Used with organic solvents[1] | — |
| Stage | Vacuum stage[1] | — |
| Power | 115 Vac[1] | — |
| Frequency | 50/60 Hz[1] | — |
| Powered lid option | CB15 Powered Lid Option[2] | — |
| Make | — | Semitool[3] |
| Equipment type | — | Spin Rinse Dryer (SRD)[3] |
| Asset # | — | 139375[3] |
| Last Confirm Date | — | September 03, 2025[3] |
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