Comparison ledger
EV Group IQ Mask, SUSS MicroTec 150 e Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | IQ MaskEV Group | 150 e MaskSUSS MicroTec |
|---|---|---|
| OEM | EV Group | SUSS MicroTec |
| Category | Lithography | Lithography |
| Wafer size | Motorized swivel arm Wafer loading trays required for desired wafer size ic devices. | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | EV Group IQ Mask | SUSS MicroTec 150 e Mask |
| Specifications | ||
| Configuration | Dual end effector robot handling configuration.[1] | — |
| Reinforced stage drives | X/Y/Theta axis Internal wedge compensation unit: Automatic wedge compensation Substrate and mask.[1] | — |
| Power | 500W or 1000W Hg lamps house Optical sets:[1] | — |
| Wafer size | Motorized swivel arm Wafer loading trays required for desired wafer size ic devices.[1] | — |
| OEM | EV Group[1] | — |
| Model | IQ Mask[1] | — |
| Category | Lithography[2] | — |
| Handling configuration | Dual end effector robot handling configuration[1] | — |
| Alignment stage | Motorized alignment stage with precision guided X, Y, T alignment[1] | — |
| Wedge compensation | Automatic wedge compensation[1] | — |
| Optics / lamps | 500W or 1000W Hg lamps house optical sets[1] | — |
| Microscope | Fully motorized split field microscope with high resolution CCD camera[1] | — |
| Bottom side microscope | Fully motorized split field microscope for bottom side viewing with high resolution CCD camera[1] | — |
| Control | Complete computer control for operator interface and alignment functions[1] | — |
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