Comparison ledger
EV Group 101, Trumpf TruLaser Station 5005 Pulsed Welding, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 101EV Group | |
|---|---|---|
| OEM | EV Group | Trumpf |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | EV Group 101 | Trumpf TruLaser Station 5005 Pulsed Welding |
| Specifications | ||
| OEM | EV Group[1] | — |
| Model | 101[1] | — |
| Equipment name | EVG 101 Spray Coater[1] | — |
| NEMO ID | evgspraycoat[1] | — |
| Training required | EVG 101 Training[1] | — |
| Training duration | 1.50 hours[1] | — |
| Processing technique | Resist Spray Coat (manual)[1] | — |
| Cleanliness | "All"[1] | — |
| Location | SNF Paul G Allen L107 Cleanroom[1] | — |
| Wafer diameter (substrate size) | up to 300 mm[2] | — |
| Available modules | Spin coat / OmniSpray® / develop[2] | — |
| Wafer handling options | Bowed / warped / thin wafer handling, edge handling[2] | — |
| Dispense options | Various resist dispense pumps covering viscosities up to 52000 cP; constant pressure dispense systems; EBR / BSR / pre-wet / bowl wash / liquid priming[2] | — |
| Processing technique (at SNF) | Resist Spray Coat (manual)[3] | — |
| Cleanliness group (at SNF) | "All"[1] | — |
| Configuration | — | TruLaser Station 5005 Includes:[4] |
| Control | — | B&R with TRUMPF HMI[4] |
| Two fibers attached | — | 20m LLK- B – 02/20M[4] |
| Laser type | — | Flash lamp pumped[4] |
| Laser class | — | Class 1[4] |
| Axis travel (Z) | — | 500 mm[4] |
| Control system | — | B&R with TRUMPF HMI[4] |
| Safety enclosure | — | Yes[5] |
| Automatic lift door | — | Yes[5] |
| Observation window | — | Yes[5] |
| Touch control panel | — | Swivel-mounted[4] |
| Integrated switch cabinet | — | Yes[5] |
| Beam delivery fibers (attached) | — | 20m LLK-B – 02/20M[4] |
| Beam delivery fibers (additional) | — | 100m LLK-B – 02/100M, 4m LLK-B – 04/4M, 15m LLK-B – 06/15M[4] |
| Welder/cutter with scanner | — | Yes[4] |
| Custom optical assemblies | — | Yes[4] |
| Laser machine | — | Laser welding machine with safety enclosure[4] |
| Axis travel | — | Z = 500 mm[4] |
| Swivel-mounted touch control panel | — | Included[5] |
| Beam delivery | — | Through fibers[5] |
| Attached fibers | — | Two fibers attached: 20m LLK- B – 02/20M[4] |
| Additional fibers | — | 100m LLK- B – 02/100M; 4m LLK- B – 04/4M; 15m LLK- B – 06/15M[4] |
| TruPulse laser | — | TruPulse 62 Pulsed Laser[4] |
| Welder/cutter | — | Welder/cutter with scanner[4] |
| Optics | — | Custom optical assemblies[4] |
| Process fibers | — | Several process fibers[4] |
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