Comparison ledger
Espec EHS-222MD, KLA 1007, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | EHS-222MDEspec | 1007KLA |
|---|---|---|
| OEM | Espec | KLA |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Espec EHS-222MD | KLA 1007 |
| Cited variants | — | |
| Specifications | ||
| Type | Highly accelerated stress test system (HAST chamber)[1] | — |
| Model | EHS-222MD[1] | 1007[2] |
| Chamber configuration | 2-stage[1] | — |
| Interior dimensions | φ394×L426 mm[1] | — |
| Temperature / humidity / pressure range | ＋105.0℃ to ＋142.9℃ / 75%rh to 100%rh / 0.019 to 0.193 MPa (Gauge)[1] | — |
| Manufacturer | — | KLA[2] |
| Description | — | Wafer Prober[2] |
| Wafer size | — | 150 mm[2] |
| Convertible to 8 inch wafer size | — | Yes[2] |
| Vintage | — | 01.06.1995[2] |
| Make | — | KLA[3] |
| Equipment type | — | Prober[3] |
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