Waferpedia

Comparison ledger

321versusAPD1

Disco 321, Logitech APD1, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
321Disco
APD1Logitech
OEMDiscoLogitech
CategoryDicing & GrindingDicing & Grinding
Wafer size—100mm
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco 321Logitech APD1
Specifications
OEMDisco[1]—
Model321[1]—
Equipment typeWafer Dicing Saw[1]—
Facility contextCleanroom Instrumentation[1]—
Application areaNano and Micro Fabrication[1]—
LocationFNT 4.106[1]—
Wafer SizeUp to 6 inches[2]—
Spindle Power1.0 kW Synchro Spindle (or 1.5 kW Synchro Spindle in some configurations)[3]—
Spindle Power (alternate)1500 Watt spindle[2]—
Non-Contact SetupNon Contact Setup[3]—
MicroscopeMicroscope With Eyepiece and Shutter (or Dual Objective Microscope With Eyepiece)[3]—
Broken Blade DetectionBroken Blade Detection[3]—
Light TowerIncludes Light Tower[3]—
Chuck Type6" Universal Chuck (or 6" Porous Film Frame Chuck)[2]—
Wafer size capabilityUp to 6" wafers[3]—
Chuck6-inch porous film frame chuck[2]—
Spindle power1500-watt spindle[2]—
FootprintSmall footprint[2]—
SetupNon-contact setup[3]—
Blade break detectionBroken blade detection[3]—
Other featuresFloppy drive, light tower, blade tools, manuals[3]—
Power supply—220/240V, 50Hz[4]
Main drive motor—230Vac 0.75kW[4]
Height—720mm[4]
Width—600mm[4]
Depth—765mm[4]
Max depth of cut, annular mode—55mm[4]
Max depth of cut, peripheral mode—100mm[4]
Min drum speed—100rpm[4]
Max drum speed, annular mode—3000rpm[4]
Max drum speed, peripheral mode—5000rpm[4]
Min feed rate—0.01mm/sec[4]
Max feed rate—2.0mm/sec[4]
Positional accuracy—5 microns[4]
Coolant tank capacity—15 litre capacity[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]tmi.utexas.edutmi.utexas.edu
  2. [2]jmind.comjmind.com
  3. [3]gtsaz.comgtsaz.com
  4. [4]web.archive.orgweb.archive.org