Comparison ledger
Canon FPA 3000 i 5 + Fine Pattern, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1000 FamilyUltratech | |
|---|---|---|
| OEM | Canon | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Canon FPA 3000 | Ultratech 1000 Family |
| Cited variants | — | |
| Specifications | ||
| Configuration | Main 1:[2] | — |
| Phase | 3 Phase[2] | — |
| Wafer sizes supported | 6 inch[3] | — |
| Power supply main 1 | 3 Phase - 3 Wire - 50/60 Hz[2] | — |
| Power supply main 2 | 1 Phase - 2 Wire - 50/60 Hz[2] | — |
| Vintage | 1997[2] | — |
| Tool type | — | Photolithography step-and-repeat 1X stepper[4] |
| Optical design | — | Wynne Dyson[4] |
| Magnification | — | 1X[4] |
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