Waferpedia

Comparison ledger

BDF 41 Diffusionversus1000 Hot Plate

Bruce BDF 41 Diffusion, CEE 1000 Hot Plate, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMBruceCEE
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBruce BDF 41 DiffusionCEE 1000 Hot Plate
Specifications
Configuration5 zone heating elements[1]4"[2]
Tube Level 4 – Annealing in N2 and H2N2[1]—
Type—Hot Plate[2]
Wafer Size—4 inch[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing