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ABM ATM 405 Atmospheric Wafer Handling Robotversus2060

Brooks ABM ATM 405 Atmospheric Wafer Handling Robot, Juki 2060, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
ABM ATM 405 Atmospheric Wafer Handling RobotBrooks
2060Juki
OEMBrooksJuki
CategoryAssembly / SMTAssembly / SMT
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks ABM ATMJuki 2060
Specifications
ConfigurationSingle Arm[1]—
ManufacturerBrooks[1]—
MakeBrooks / PRI[2]—
ModelABM / ATM 405[2]—
Tool typeAtmospheric wafer handling robot[2]—
Wafer sizes612 inch[2]—
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Sources (2)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing