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017-0146-01 PrealignerversusScanner 203 B

Brooks 017-0146-01 Prealigner, Nikon Scanner 203 B, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
017-0146-01 PrealignerBrooks
Scanner 203 BNikon
OEMBrooksNikon
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—1999 Manufacturing vintage
Control system——
Generation——
FamilyBrooks 017-0146-01 PrealignerNikon Scanner
Specifications
Configuration—0.18um[1]
Resolution—0.18um[1]
Wafer Sizes—6 inch, 8 inch[1]
Vintage—1999[1]
017-0146-01 Prealigner entryScanner 203 B entryAsk about these tools →Share experience with this comparison →

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing