Waferpedia

Comparison ledger

0 V 500versusLSA101

Blue M 0 V 500, Veeco LSA101, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0 V 500Blue M
LSA101Veeco
OEMBlue MVeeco
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced—2021
Production run——
Lifecycle——
Lifecycle milestones—2021 First shipment
Control system——
Generation——
FamilyBlue M 0 V 500Veeco LSA101
Specifications
System type—Laser Spike Annealing System[1]
Process application—Precision doping of materials at a controlled temperature[1]
Origination facility—San Jose, California[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]en.wikipedia.orgen.wikipedia.org