Waferpedia

Comparison ledger

0 V 500versusLSA100

Blue M 0 V 500, Ultratech LSA100, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0 V 500Blue M
LSA100Ultratech
OEMBlue MUltratech
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node—65 nm
Introduced—2004
Production run——
Lifecycle——
Lifecycle milestones—2004 Introduction on Unity Platform
Control system——
Generation——
FamilyBlue M 0 V 500Ultratech LSA100
Specifications
Type—annealing system[1]
Process—Laser Processing laser spike annealing[1]
Platform—Unity Platform[1]
Introduction—mid-2004[1]
Node association—beyond the 65-nm node[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]en.wikipedia.orgen.wikipedia.org