Waferpedia

Comparison ledger

0 V 500versusPCO 520

Blue M 0 V 500, Heller PCO 520, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0 V 500Blue M
PCO 520Heller
OEMBlue MHeller
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlue M 0 V 500Heller PCO 520
Specifications
Phase—3 Phase[1]
Largest Heater Load—20.7 A[1]
Short Circuit Interrupting Capacity—10K A[1]
Equipment type—Pressure curing oven[2]
Make—Heller[1]
Model—PCO 520[1]
Voltage—208-220 V[1]
Current—102 A[1]
Frequency—50-60 Hz[1]
Typical process time—120 min or per user spec[2]
Operating temperature—60°C – 200°C[2]
Max temperature—220°C[2]
Operating pressure—1 – 10 bar[2]
Capacity—24 magazines (typical)[2]
Cooling method—PCW (17°C – 23°C)[2]
Cooling water pressure—25 – 40 psi[2]
Oven size—2,200[L] x 1,700[W] x 1,700[H] mm[2]
Chamber usable area—716.5[L] x 608[W] x 440[H] mm[2]
Max operating pressure—10 bar (145 psi)[2]
Max operating temperature—200°C[2]
Loading type—Manual loading[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]sinerji-grup.comsinerji-grup.com