Waferpedia

Comparison ledger

0 500versus1500 SX

Blue M 0 500, Heller 1500 SX, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0 500Blue M
1500 SXHeller
OEMBlue MHeller
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlue M 0 500Heller 1500 SX
Specifications
ManufacturerBlue M[1]—
Model0 500[1]1500 SX[2]
Asset number139866[1]—
Last confirm dateSeptember 10, 2025[1]—
Equipment typeOven[1]—
Make—Heller[2]
Asset type—Oven[2]
Vintage—1999[2]
Category—Thermal / Diffusion[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]waferpedia.comwaferpedia.com