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VHCPversus200 PCU

Applied Materials VHCP, Axcelis 200 PCU, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
VHCPApplied Materials
200 PCUAxcelis
OEMApplied MaterialsAxcelis
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—2000 Vintage
Control system——
Generation——
FamilyApplied Materials VHCPAxcelis NV GSD 200
Cited variants—
  • Fusion 200 PCU[1]
  • Fusion 200 PCU-P[2]
Specifications
P/N—SC 4840 A[3]
Frequency—50 Hz[3]
Phase—3 Phase[3]
Voltage—400 V[3]
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Sources (3)Every fact above is drawn from these public sources
  1. [1]exapro.comexapro.com
  2. [2]fabsurplus.comfabsurplus.com
  3. [3]inventory listing