Waferpedia

Comparison ledger

0021 20868 PartversusVHS 4

Applied Materials 0021 20868 Part, Varian VHS 4, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0021 20868 PartApplied Materials
VHS 4Varian
OEMApplied MaterialsVarian
CategoryLab & Support EquipmentLab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0021 20868 PartVarian VHS
Specifications
ConfigurationBar, Bus, Gnd, Turbo Cb Encl, Gen Rack,[1]—
Pumping Speed—1200 l/s[2]
ASA Type Flange—9 in. OD, 5.9 in. ID[2]
Voltage—120V, 50/60 Hz[2]
Voltage/Frequency—120V, 50/60 Hz[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing