Waferpedia

Comparison ledger

0020 12458 PartversusOpAL

Applied Materials 0020 12458 Part, Oxford Instruments OpAL, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 12458 PartApplied Materials
OpALOxford Instruments
OEMApplied MaterialsOxford Instruments
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 12458 PartOxford Instruments OpAL
Specifications
ConfigurationInsulator,Side Match,Hdp-Cvd Ultima Plus[1]Single open loop chamber (non-loadlocked)[2]
Asset number146526[1]—
MakeApplied Materials[1]—
Model0020 12458[1]—
Heated table—80-300ºC[2]
Voltage—208V, 3Ph, 60Hz, 25A[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing