Waferpedia

Comparison ledger

0010-18024 Pyrometer AssemblyversusINS 3000 Macro Defect

Applied Materials 0010-18024 Pyrometer Assembly, KLA INS 3000 Macro Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyKLA INS 3000
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]No HDD[2]
Loading Configuration—SMIF[2]
Number of Cassette Stations—1[2]
Leica INS Series—INS-3000[2]
Microscope Objective Sizes—NA[2]
Make—KLA / Leica[2]
Model—INS 3000[2]
Wafer size—8 inch[2]
Series—INS-3000[2]
Cassette stations—1[2]
DIC—No[2]
ADC—No[2]
OCR—No[2]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing