Comparison ledger
Applied Materials 0010-18024 Pyrometer Assembly, Hitachi S 5000 FE-SEM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-18024 Pyrometer AssemblyApplied Materials | S 5000 FE-SEMHitachi |
|---|---|---|
| OEM | Applied Materials | Hitachi |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1998 Vintage stated |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-18024 Pyrometer Assembly | Hitachi S 5000 FE-SEM |
| Specifications | ||
| Configuration | Capable of working on Applied Materials Radiance[1] | — |
| Tool type | — | Field Emission Scanning Electron Microscope (FE-SEM)[2] |
| Accelerating voltage | — | 30 kV[3] |
| Magnification | — | 500,000x[3] |
| Performance image resolution | — | 0.6 nm at 30 kV; 3.5 nm at 1 kV in secondary electron image[3] |
| Electron gun | — | Cold field emission source[3] |
| Accelerating voltage range | — | 0.5 to 30 kV in 0.1 kV steps[3] |
| Specimen stage motion | — | X ±3.5 mm continuous; Y ±2 mm continuous; tilt ±40 degrees continuous[3] |
| Specimen size | — | 9.5 mm x 5 mm x 2.4 mm for standard holder; 20 mm x 6 mm x 2.4 mm maximum for larger specimen holder[3] |
| Specimen exchange | — | Airlock type with prepumping[3] |
| Vacuum pumps | — | IP1 60 l/s; IP2 20 l/s; IP3 20 l/s; TMP 340 l/s; RP 140 l/min (168 l/min) x 2 sets[3] |
| Standard equipment | — | Column, display unit, power supply, S-5080 camera, air compressor, rotary pumps, standard tool, spares and consumables, instruction manual, auto transformer[3] |
| Dimensions and weight - column | — | 89(w) x 103(d) x 160(h) cm; 385 kg[3] |
| Dimensions and weight - display | — | 110(w) x 90(d) x 116(h) cm; 235 kg[3] |
| Dimensions and weight - power supply | — | 54(w) x 63(d) x 150(h) cm; 215 kg[3] |
| Dimensions and weight - rotary pump | — | 54(w) x 22(d) x 41(h) cm; 32 kg x 2 sets[3] |
| Dimensions and weight - air compressor | — | 40(w) x 23(d) x 55(h) cm; 18 kg[3] |
| Dimensions and weight - auto transformer | — | 33(w) x 35(d) x 38(h) cm; 72 kg[3] |
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