Comparison ledger
Applied Materials 0010-18024 Pyrometer Assembly, Dektak 6 M Stylus, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-18024 Pyrometer AssemblyApplied Materials | 6 M StylusDektak |
|---|---|---|
| OEM | Applied Materials | Dektak |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-18024 Pyrometer Assembly | Dektak 6 M Stylus |
| Specifications | ||
| Configuration | Capable of working on Applied Materials Radiance[1] | — |
| Maximum step height | — | 1 mm[2] |
| Vertical resolution | — | 0.1 nm[2] |
| Minimum resolvable step height | — | 200 angstroms (20 nm)[3] |
| Point-to-point resolution | — | 1 angstrom (0.1 nm)[3] |
| Scan length range | — | 50 µm to 30 mm[2] |
| Stylus force range | — | 9.8 mN to 147 mN (1 mgf to 15 mgf)[2] |
| Maximum sample thickness | — | 31 mm[2] |
| Stylus tip radius | — | 12 µm[3] |
| Horizontal resolution | — | well less than 0.1 µm (dependent on scan parameters)[3] |
| Repeatability on 5000 Å step | — | typically a few percent standard deviation[3] |
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