Comparison ledger
Applied Materials 0010-18024 Pyrometer Assembly, Bruker Dektak XT, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-18024 Pyrometer AssemblyApplied Materials | Dektak XTBruker |
|---|---|---|
| OEM | Applied Materials | Bruker |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | 2 in, 4 in, 6 in, 8 in |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-18024 Pyrometer Assembly | Bruker Dektak |
| Specifications | ||
| Configuration | Capable of working on Applied Materials Radiance[1] | 4" Stage and movement controlled by software[2] |
| Stylus diameter | — | 12.5 Microns[2] |
| Measurement type | — | Stylus surface profiler for thin and thick film step height[3] |
| Wafer compatibility | — | 2 in, 4 in, 6 in, 8 in[3] |
| Magnification / Field of View | — | Selectable 1 to 4 mm FOV[3] |
| Scan length range | — | 55 mm (with stitching option)[3] |
| Vertical range | — | 1 mm[3] |
| Step-height repeatability | — | 5 Å[3] |
| Low force (N-Lite+) | — | 0.03 to 15 mg[3] |
| 3D capabilities | — | 3D stress and 3D mapping[3] |
| Compatible wafer sizes | — | 2", 4", 6", 8"[3] |
| Selectable magnification | — | 1 to 4mm FOV[3] |
| N-Lite+ Low Force | — | 0.03 to 15mg[3] |
| 3D stress and 3D mapping | — | Supported[3] |
| Tool Type | — | Stylus surface profiler[3] |
| Wafer Compatibility | — | 2″, 4″, 6″, 8″ wafers[3] |
| Field of View Magnification | — | Selectable, 1 to 4mm FOV[3] |
| Type | — | stylus surface profiler[3] |
| Measurement purpose | — | advanced thin and thick film step height measurement[3] |
| Low force mode | — | N-Lite+ Low Force with 0.03 to 15mg[3] |
| Measurement modes | — | 3D stress and 3D mapping[3] |
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