Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Lam Research Kiyo 45, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | Kiyo 45Lam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Lam Research Kiyo |
| Specifications | ||
| OEM | Applied Materials[1] | — |
| Model | 0010-16392[1] | — |
| Type | ESC Assembly[1] | — |
| Wafer Size | 300 mm[2] | — |
| Electrode Configuration | Dual[2] | — |
| Configuration | — | 2 Chamber + 1 Strip[3] |
| Loadport | — | Brooks 799-701175-005[3] |
| ATM Robot | — | Brooks P/N 138150[3] |
| TM Robot | — | Brooks P/N 201600-01[3] |
| MKS E28B-30200 Process Vacuum Gauge | — | 0.1 Torr[3] |
| MKS 625A-14059 Chamber Vacuum Gauge | — | 1 Torr[3] |
| MKS D24B12TCECB0 Micro Wave Vacuum Gauge | — | 100 Tor[3] |
| Chamber configuration | — | 2 Chamber + 1 Strip[3] |
| Process Vacuum Gauge | — | MKS E28B-30200, 0.1 Torr[3] |
| Chamber Vacuum Gauge | — | MKS 625A-14059, 1 Torr[3] |
| Micro Wave Vacuum Gauge | — | MKS D24B12TCECB0, 100 Torr[3] |
| Air Lock Heating Gauge | — | Teledyne HPM-2002-OBE-LM[3] |
| Turbo Pump | — | Edwards SCU 1500[3] |
| Turbo Pump Controller | — | Edwards SCU 1600[3] |
| Bias RF Generator | — | Lam 3156110-214[3] |
| TCP RF Generator | — | Lam 3156110-313[3] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →